SPECIFICATIONS：PhysicalExcel 654UMExcel 654UCMeasuring Volume600*650*400mmExternal Dimensions1311*1604*2088mmWeight1500kgCapacity100kgStageSteelBase MdterialGraniteWaysUnique X&Y Monorail,Monorail Linear ZMotion CortrolServo:CNC,Moues,and Pendant ControlPower Requirements93-264VAC,47-63Hz,10Amp max.PerformanceExcel 654UMExcel 654UCXY AccuracyUxy=3.0+L/300µmZ AccuracyUxy=3.0+L/150µmXY Repeat3.0µmZ Repeatability3.0µmX,Y Acceleration1000mm/s2Z Acceleration500mm/s2X,Y Speed150mm/s2Scale Resolution0.1µmFeaturesExcel 654UMExcel 654UCVideoHi-Res B&WHi-Res Colorlllumination SourceRed LEDsWhite LEDsLightingSurface,Profile,and AxialOptics/Magnification12*Opucal/2.5*Digltal Programmable Zoom/15x～1200x on   SreenSoftwareInSpec for Windows Metrolongy Software(2000/XP/Vista)Environmental20℃(680F)±20,30-80% HumiditiyWarranty1Year Parts & Service